High Purity Alumina Ceramic Wafer Polishing Plates/Turn Table
High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; the uniform chemical durability and special treated materials maintains good surface shape over a long period of time.
| Material | Self Formulated Alumina 99% |
|---|---|
| Shape | Convex, flat and concave available. |
| Size | MAXφ850mm |
| Precision | Flatness: 1μm or less |
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