Repair ,recondition and rebuild of wafer chucks ( polishing,grinding,inspection,dicing )

Repair ,recondition and rebuild of dicing chucks

Chuck Table of Main Stream Wafer Dicing Saw and Grinder

www.chuck-table.com

Repair or rebuilt, save time and save money

DISCO

DAC-552

DAD-2H/6

DAD-2h/6T

DAD-320

DAD-321

DAD-3350

DAD-340

DAD-341

DAD-521

DAD-641

DAD-651

DFD-651

DFD-6361

DFD-6362

DFD-6340
DAD-3220/3230/3430
DFG-8540 GRINDER
DAG-810 GRINDER

ADT

7120/7130
7200
7900
977


ACCRETECH

AD3000T/S
AD2000T/S
AD20T/S
SS10,SS20,SS30
PS290PLUS
ML300PLUS 
ML200 PLUS 
A-CS-100A
PG3000RM/PG200RM

TSK

TSK AWD200T

TSK AWD300T

K&S

K&S-982-6

K&S-982-10

Strasbaugh

7AA-II 
7AF-II
6DS
6EC

Loadpoint

MICROACE 66
NANOACE300
NANOACE200
NANOACE VS
MACROACE


Applied Materials


Okamoto

VG-502MKII-8


Shuwa

SGM-7000
SGM-6301


Micro Automation

1100
1006A

Y mucho mas!

www.

Thin Film or Wafer Carriers

Thin Film or Wafer Carriers

Sapphire material is now widely used in optical and semiconductor industry, with hardness second only to diamond and chemical and scratch resistance and thermal stability ,it is superior to other materials such as quartz.

Sapphire carrier are used to hold and transport thin film processing of silicon,GaAs other semiconductor wafers and flexible substrates.

All thin substrate carriers are ultra flat and can be supplied with or without custom perforated holes,other option of porous ceramic is also our expertise.

Current sizes are available typically from 2" to 12" dia with flatness and parallelism of 0.002-0.005mm, large size till 20 inches is also  successfully prototyped.

www.chuck-table.com

Porous Ceramic Disc Data Sheet

Porous Ceramic Disc/Plate Data Sheet

Diameter inch	Diameter cm	Pressure Bar	Pore Size micron	Porosity %by Volume
0.625	1.588	0.5	6	50
0.625	1.588	1	1.7	34
0.625	1.588	2	1.3	38
0.625	1.588	3	0.7	34
0.625	1.588	5	0.5	31
0.625	1.588	15	0.16	32
1.125	2.858	0.5	6	50
1.125	2.858	1	2.5	45
1.125	2.858	2	1.3	38
1.125	2.858	3	0.7	34
1.125	2.858	5	0.5	31
1.125	2.858	15	0.16	32
1.625	4.128	0.5	6	50
1.625	4.128	1	2.5	45
1.625	4.128	2	1.1	32
1.625	4.128	3	0.7	34
1.625	4.128	5	0.5	31
1.625	4.128	15	0.16	32
2.625	6.668	0.5	6	50
2.625	6.668	1	2.5	45
2.625	6.668	2	1.1	32
2.625	6.668	3	0.7	34
2.625	6.668	5	0.5	31
2.625	6.668	15	0.16	32
3.125	7.938	0.5	6	50
3.125	7.938	1	1.7	34
3.125	7.938	2	1.1	32
3.125	7.938	3	0.7	34
3.125	7.938	5	0.5	31
3.125	7.938	15	0.16	32
4.125	10.478	0.5	6	50
4.125	10.478	1	2.5	45
4.125	10.478	2	1.1	32
4.125	10.478	3	0.7	34
4.125	10.478	5	0.5	31
4.125	10.478	15	0.16	32
5.125	13.018	0.5	6	50
5.125	13.018	1	2.5	45
5.125	13.018	2	1.1	32
5.125	13.018	3	0.7	34
5.125	13.018	5	0.5	31
5.125	13.018	15	0.16	32
6.125	15.558	0.5	6	50
6.125	15.558	1	2.5	45
6.125	15.558	2	1.1	32
6.125	15.558	3	0.7	34
6.125	15.558	5	0.5	31
6.125	15.558	15	0.16	32
10.875	27.623	0.5	6	50
10.875	27.623	1	2.5	45
10.875	27.623	2	1.1	32
10.875	27.623	3	0.7	34
10.875	27.623	5	0.5	31

www.chuck-table.com

Vacuum Wafer Chuck Table

Vesicular ceramic Vacuum Chuck Table

Vesicular ceramic vacuum chuck tables ( Porous ceramic vacuum chuck table ) are widely used  for Dicing Saw, Laser Dicing, Laser marketing, Grooving, Wafer back grinding and Wafer mounting which requires high degree of parallelism. Our precision machining capability is worldly approved by semi conductor industry

Round ,rectangular and custom size available.

Size	Parallelism
4 ˝	2 ㎛
6 ˝	3 ㎛
8 ˝	5 ㎛
12 ˝	5 ㎛,

* Different specifications can be manufactured per request,repair service also available.

www.chuck-table.com

Porous Ceramic Chuck Table, Disco, K&S, ADT, reguar or custom size

Highly parallelism and flatness!

1um on 8" Dia is not only possible ,but also a standard!

 

Werlchem LLC is serving the world semi conductor industry right from the heart of the world semi conductor industry-- the silicon valley.

We provide porous ceramic chuck table,dicing blade,diamond slurry, end effector etc for ADT, K&S, DISCO Loadpoint machines.

 

Porous ceramic vacuum chuck table or Polishing Chuck table supplied to semiconductor industry for silicon wafer dicing or finishing purposes
.This product is an uniform compact frame, high strength, good porosity, durable absorption, excellent quality with high efficiency, no pollution, high fixing precision.Available sizes diameter of round and square ,4inch,5inch,6 inch , 8 inch ,9 inch, 12 inch and custom size or design with high parallelism and flatness.
Services Provided as below:.Fabrication New Porous Ceramic Vacuum Chuck.Repair uneven surfaces and parallelize the porous chuck
.Refurbish the unusable chuck with new porous ceramic plate

Need more information? please feel free to contact.Refurbish the unusable chuck with new porous ceramic plate
Need more information? please feel free to contact
California, USA

www.chuck-table.com

Wafer Polishing Plates

High Purity Alumina Ceramic Wafer Polishing Plates/Turn Table

High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; the uniform chemical durability and special treated materials maintains good surface shape over a long period of time.

http://www.chuck-table.com

Material	Self Formulated Alumina 99%
Shape	Convex, flat and concave available.
Size	MAXφ850mm
Precision	Flatness: 1μm or less

Porous Ceramic Vacuum Chuck Table

Porous Ceramic Chuck Table for Semi Conductor ,LED,Solar Industry

DAD321;DAD322,DAD3350,DFL7020,DAD641ADT710...

New,refurbish,custom design,round,squre,4",6",8",9",10",12"...
your contact just near by silicon vally
wilson.wu@aol.com
www.chuck-table.com

Semixicon is a trade mark of Werlchem LLC for Semiconductor components to American continent.